Ion Beam Sputtering Thesis

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In this way, a complete stoichiometry for inorganic nanophases was obtained, allowing for the conversion of fluorides into Zn O.

View Full-Text This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited . Chicago/Turabian Style Sportelli, Maria C.; Valentini, Marco; Picca, Rosaria A.; Milella, Antonella; Nacci, Angelo; Valentini, Antonio; Cioffi, Nicola.

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The conventional FIB systems which utilize liquid gallium ion sources to achieve nanometer scale resolution can no longer meet the various requirements raised from such a wide application area such as low contamination, high throughput and so on.

The drive towards controlling materials properties at nanometer length scales relies on the availability of efficient tools.Moreover, tuning IBS deposition parameters allows for the control of Zn ONP loadings, thus modulating the antibacterial/antistain coating’s final properties.All the deposited coatings were fully characterized by X-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM), and transmission electron microscopy (TEM) in order to obtain information on the materials’ surface composition, with deep insight into the nanocoatings’ morphology as a function of the Zn ONP loadings.In this thesis, three novel ion beam tools have been developed and investigated as the alternatives for the conventional FIB systems in some particular applications.An integrated focused ion beam (FIB) and scanning electron microscope (SEM) system has been developed for direct doping or surface modification.The RF field excites free electrons until they have enough energy to break gas atoms into ions and electrons; this is referred to as “inductive coupling“.The gas is thus ionized and a plasma is established.Ion beam co-sputtering (IBS) of zinc oxide (Zn O) and poly-tetrafluoroethylene (PTFE) targets allows for the preparation of novel multifunctional coatings composed of antimicrobial Zn O nanoparticles (NPs) finely dispersed in an antistain PTFE polymeric matrix.Remarkably, IBS has been proved to be successful in the controlled deposition of thin nanocoatings as an alternative to wet methods.This paper presents a review of Ion Beam Technology.In this review the main applications and advantages of using Ion Beam technology for deposition processes when compared to technology such as plasma or evaporation (PVD) will be presented.


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